Abstract:The present work is devoted to the experimental determination of the uniformity of the ion flux density on a substrate with an increased size (~200 cm2 ) in order to form nanostructures by the laser-plasma method. The system for deposition of nanostructures consists of an erosion laser torch of the target material and a substrate located in a vacuum chamber. For smooth adjustment of the parameters of the deposited particles on the substrate, a grid is located between the laser target and the substrate, on whic… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.