No abstract

which are environmentally friendly and enable portability and high efficiency. Up to date, great progress has been made on the UVC light-emitting diodes (LEDs) by using active regions of AlGaN multiple quantum wells (MQWs) .[8-14] However, the optical output power of current UVC LEDs drops significantly as the light emission wavelength gets shorter. Those LEDs suffer from poor hole injection efficiency in high-Al-content p-type AlGaN, low internal quantum efficiency (IQE) caused by large-lattice-mismatch heteroepitaxy, and strong quantum-confined Stark effect (QCSE), as well as the absorption by the nontransparent GaN contact layers. [15][16][17] A promising approach that dramatically improves the light output power is electron-beam (e-beam) pumping, especially for the short-wavelength UVC spectral range. [3,[18][19][20][21][22][23][24] This approach allows one to bypass the need for p-type or n-type injection layers and, thus, can largely increase the carrier injection efficiency. This provides a unique advantage over conventional LEDs at UVC range, since the p-type doping for high-Al-content AlGaN is High-output-power electron-beam (e-beam) pumped deep ultraviolet (DUV) light sources, operating at 230-270 nm, are achieved by adjusting the well thickness of binary ultrathin GaN/AlN multiple quantum wells. These structures are fabricated on high-quality thermally annealed AlN templates by metal-organic chemical vapor deposition. Owing to the reduced dislocation density, large electron-hole overlap, and efficient carrier injection by e-beam, the DUV light sources demonstrate high output powers of 24.8, 122.5, and 178.8 mW at central wavelengths of 232, 244, and 267 nm, respectively. Further growth optimization and employing an e-gun with increased beam current lead to a record output power of ≈2.2 W at emission wavelength of ≈260 nm, the key wavelength for water sterilization. This work manifests the practical levels of high-output-power DUV light sources operated by using e-beam pumping method. The ORCID identification number(s) for the author(s) of this article can be found under https://doi.org/10.1002/adom.201801763.Solid-state deep ultraviolet (DUV) optoelectronic devices in the spectral range of 200-280 nm, i.e., ultraviolet-C (UVC), have attracted much attention for their wide applications in sterilization, medical treatment, security, solar-blind photodetection, and so on. [1][2][3][4][5][6][7] Currently, Al(Ga)N material system is the most promising candidate for solid-state UVC light sources

Quasi-2D GaN layers inserted in an AlGaN matrix are proposed as a novel active region to develop a high-output-power UV light source. Such a structure is successfully achieved by precise control in molecular beam epitaxy and shows an amazing output power of ≈160 mW at 285 nm with a pulsed electron-beam excitation. This device is promising and competitive in non-line-of-sight communications or the sterilization field.

We report the internal structures and emission properties of GaN/AlN single- and multiple-quantum-well (QW) heterostructures with well widths of dw = 1–4 monolayers (MLs), grown by plasma-assisted molecular-beam epitaxy on c-sapphire at metal-rich conditions and low temperatures (∼700 °C). The formation of plane QWs with abrupt symmetrical interfaces is confirmed by both scanning transmission electron microscopy and X-ray diffraction analysis. Pulse-scanning and continuous-wave output powers of 150 and 28 mW, respectively, at a peak emission wavelength of 235 nm were achieved at 300 K in an electron-beam-pumped deep-ultraviolet (1.5 ML-GaN/5.5 nm-AlN)360 multiple-QW emitter with a maximum efficiency of 0.75%.