The hyperfine structure splittings (hfs) and isotope shifts (IS) in the atomic transitions 5s 2 5p 2 ~So ~5s 2 5p6s 1.3p~ have been measured for the radioactive isotopes lo8 ~l~Sn and all stable ones. The tin isotopes were prepared as fast atomic beams for collinear laser spectroscopy at the GSI online mass separator following a fusion reaction. Nuclear spins, magnetic dipole, electric quadrupole moments and changes in mean square charge radii have been determined. In a~ the spin I=5/2 was measured for the nuclear ground state (Tt/2= 18 min) in contradiction to the literature value. The mean square charge radii show a parabolic behaviour with a maximum at N = 66. This is interpreted by collective effects, which are considerably stronger than accounted for by the B(E2)values.

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After the successful completion ofthe European program EUCLIDES'in which core competence for Extreme UltraViolet Lithography (EUVL) technology was generated, ASML (system integration), Carl Zeiss (optics), and their partners have entered the next phase ofthe program: design and realization of an exposure tool called the alpha tool (ct-tool). This tool should be completed in 2003, and will demonstrate 50-nm-node compliant imaging using full-field all-reflective four-times reducing optics, as well as high performance vacuum scanning wafer-and reticle stages. In this paper we present the status ofthe project, as well as highlight the progress in the optics development and optics contamination mitigation efforts.

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