C-axis-oriented barium titanate (BaTiO3) epitaxial films with an atomically smooth surface have been fabricated on SrTiO3{100} substrates using the pulsed laser deposition technique. The crystal structure and epitaxial orientation of the films have been analyzed by means of 2θ/θ X-ray diffractometry and 4-circle X-ray diffractometry. The highly oriented and epitaxial crystallinity is also shown by means of Rutherford backscattering spectrometry which gave a χmin of 1.7%. The atomically smooth surface comparable to that of the SrTiO3 substrate is revealed by means of atomic force microscopy. The breakdown electric field of the BaTiO3 film is as high as 106 V/cm.
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