Plasma‐polymerized PMMA films were obtained by a low‐temperature ambient deposition technique using a floating‐electrode DBD jet with two distinct operation modes, namely a diffuse mode and a concentrated mode. Deposition rates, surface morphologies, atomic compositions, and chemical bond concentrations of the PMMA films showed a dependence on the modes. In the concentrated mode rapid deposition (22 nm · s−1) can be achieved with the substrate temperature merely rising to 39 °C. Besides transparent PMMA films with high quality, opaque films with wrinkled microstructures due to buckling effects were obtained. Similar functional groups to those in pure PMMA were also observed by both XPS and FTIR results. It was demonstrated that PMMA films can be successfully grown on different substrate materials, such as glass, plastic, rubber, onion skin, and fingernail.
This study demonstrates that plasma-enhanced chemical vapor deposition of copper films can be achieved in ambient air and at low temperature. A helium dielectric barrier discharge jet with a small mixture of hydrogen and copper(II) acetylacetonate vapor is utilized as the nonthermal plasma source to deposit conductive copper films with low electrical resistivity (<1 × 10 −7 Ω•m). The deposited film appears to have three distinct regions (reddish brown, dark blue, and yellowish) from center to edge. Copper nanograins (~50 nm) are observed in both the reddish-brown and the dark-blue regions, whereas the yellowish region exhibits a continuous structure containing copper oxide. The copper films are further deposited on various temperature-sensitive substrates, including plastic, cardboard, agar, and pork skin. K E Y W O R D S atmospheric-pressure nonthermal plasma jet, copper(II) acetylacetonate, dielectric barrier discharge, plasma-enhanced chemical vapor deposition, thin films
This study investigated the discharge uniformity in helium dielectric barrier discharge jets (DBD jets) with various operation parameters. The significant reduction of the discharge uniformity was found to be induced by various operation modes in the DBD jets, in which concentrated plasma channels with relatively high intensity are created. This may lead to non-uniform treatment if the DBD jets are used as surface processing tools. It has been shown that the applied voltage, tube dimension, driving frequency, and helium flow rate significantly influence the plasma channel formation. 1 However; few reports have presented detailed studies on the plasma propagation and the formation of the plasma channels.
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