The possibility for white light emitting devices using carbon nitride (CNx) thin films has been studied. Microwave ECR-plasma CVD and RF-sputtering apparatuses have been used for the formation of CNx thin films. In both cases, CH4 was used as the source or sub-source of carbon in order to investigate the effect of hydrogenated carbon nitride for luminescence. The cathodeluminescence (CL) measurement of the film grown by ECR-plasma CVD method showed three peaks of R/G/B. The photoluminescence (PL) measurement of the film grown by RF-sputtering also showed the red peak, which could not be observed in the film without hydrogen. Together with the X-ray Photoelectron Spectroscopy (XPS) analysis data, we concluded that the red peak originates from C-H bonds and blue peak from C-N bonds.
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