We developed a new high-sensitive MEMS acceleration sensor for seismic exploration applying automotive control technology of MEMS acceleration sensor. Using the developed MEMS acceleration sensors, we build 100 pieces of the prototype sensor that detects 3-axial direction (x, y and z axes) acceleration for the seismic exploration system. The developed high-sensitive MEMS sensor is an electronic capacitance type using movable overhung silicon plate electrode that has gained achievements for automotive application. This detection system is high-sensitive and excellent in detecting temperature and DC characteristic detection. Under the theme of this study based on the technology of automotive MEMS acceleration sensor, we pursued development of achieving the required quality and performance for the reflection method seismic-exploration system aiming higher sensor sensitivity and more appropriateness of frequency characteristic, by reviewing structural analysis using Finite element method for simulation, reviewing Brownian noise and control of Squeeze film damping. The system of the trial built seismic-exploration system is configured focusing expected ultra-large scale measurements covering millions of channels foreseeable in near future, using automotive technologies.
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