Development of the high sensitivity MEMS accelerometer for oil and gas exploration

Tsunoda, Takahiro; Sekine, Toru; Kunimi, Takashi; Ito, Shunichiro; Aizawa, Takao; Kato, Akira; Matsuoka, Toshifumi

doi:10.1190/segj112013-006

Proceedings of the 11th SEGJ International Symposium, Yokohama, Japan, 18-21 November 2013 2013

DOI: 10.1190/segj112013-006

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Development of the high sensitivity MEMS accelerometer for oil and gas exploration

Takahiro Tsunoda¹,

Toru Sekine²,

Takashi Kunimi³

et al.

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Development of the high sensitivity MEMS accelerometer for oil and gas exploration

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