This paper reports a novel model-order reduction (MOR) approach for creating fast-running, nonlinear, multiphysics models in Verilog-A. This new approach differs from previous work by creating the reduced order model (ROM) directly from an accurate, nonlinear, multi-physics representation. The mechanical and electrical nonlinearities of the MEMS structure are persevered to capture effects such as quadrature, amplitude-dependent frequency shifting and electrostatic softening. The reduction algorithm has been implemented in the commercial MEMS/IC co-design tool MEMS+. The approach's effectiveness is validated for a state-ofthe-art, three-axis, capacitive gyroscope from Murata Electronics by comparing simulations of the created Verilog-A model with experimental data.

This paper reports a novel model order reduction approach for creating fast-running, nonlinear, multiphysics models of MEMS sensors for Simulink. The accuracy of this new approach is validated for a state-of-the-art threeaxis capacitive gyroscope from Murata Electronics ( Figure 1). A nonlinear reduced-order model (ROM) of the gyroscope that preserves the electrostatic softening effect and Coriolis sensing is generated. Comparisons to measured data showed that the generated ROM accurately predicts nonlinear behavior while preserving fast simulation speed.

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