We investigate the optical and opto-electronic properties of black silicon (b-Si) nanostructures passivated with Al 2O 3. The b-Si nanostructures significantly improve the absorption of silicon due to superior anti-reflection and light trapping properties. By coating the b-Si nanostructures with a conformal layer of Al 2O 3 by atomic layer deposition, the surface recombination velocity can be effectively reduced. We show that control of plasma-induced subsurface damage is equally important to achieve low interface recombination. Surface recombination velocities of S eff 13 cm / s have been measured for an optimized structure which, like the polished reference, exhibits lifetimes in the millisecond range
LT) can be achieved for weakly absorbed photons with energies close to the absorption edge of silicon. [ 15 ] These properties of b-Si are particularly useful for photovoltaic applications.The limiting effi ciency of a solar cell is given by the detailed balance of absorption and radiative recombination [ 16 ] and by nonradiative processes like Auger-and impurity recombination. [17][18][19] b-Si can help to approach those limits in two ways. On the one hand b-Si improves the coupling of light into the solar cell and the absorption of near band edge photons. This in turn increases the short circuit current and on a logarithmic scale also the open circuit voltage. On the other hand, due to excellent light-trapping properties b-Si might also allow reducing the solar cell thickness substantially below 100 µm while sustaining a high light absorption. This reduces nonradiative bulk recombination losses that scale linearly with the solar cell thickness [ 17,18 ] and hence, increases the open-circuit voltage. Of course, reducing the solar cell thickness also increases the cost effi ciency. Decreasing the amount of required silicon feedstock is a major industry concern as can be seen by the growing interest in kerf-free crystalline silicon solar cell technologies. [20][21][22] Unfortunately, besides bulk effects, surface recombination imposes a very critical limit to the solar This article presents an overview of the fabrication methods of black silicon, their resulting morphologies, and a quantitative comparison of their optoelectronic properties. To perform this quantitative comparison, different groups working on black silicon solar cells have cooperated for this study. The optical absorption and the minority carrier lifetime are used as benchmark parameters. The differences in the fabrication processes plasma etching, chemical etching, or laser processing are discussed and compared with numerical models. Guidelines to optimize the relevant physical parameters, such as the correlation length, optimal height of the nanostructures, and the surface defect densities for optoelectronic applications are given.
Black Silicon nanostructures are fabricated by Inductively Coupled Plasma Reactive Ion Etching (ICP-RIE) in a gas mixture of SF6 and O2 at non-cryogenic temperatures. The structure evolution and the dependency of final structure geometry on the main processing parameters gas composition and working pressure are investigated and explained comprehensively. The optical properties of the produced Black Silicon structures, a distinct antireflection and light trapping effect, are resolved by optical spectroscopy and conclusively illustrated by optical simulations of accurate models of the real nanostructures. By that the structure sidewall roughness is found to be critical for an elevated reflectance of Black Silicon resulting from non-optimized etching processes. By analysis of a multitude of structures fabricated under different conditions, approximate limits for the range of feasible nanostructure geometries are derived. Finally, the technological applicability of Black Silicon fabrication by ICP-RIE is discussed
An ultra-black (A > 99%) broadband absorber concept on the basis of a needle-like silicon nanostructure called Black Silicon is proposed. The absorber comprises Black Silicon established by inductively coupled plasma reactive ion etching (ICP-RIE) on a highly doped, degenerated silicon substrate. Improved absorbers also incorporate an additional oxide capping layer on the nanostructures and reach an absorptance of A > 99.5% in the range of 350 to 2000 nm and A ∼ 99.8% between 1000 and 1250 nm. Fabrication of the absorbers is consistent with CMOS standards and requires no lithography.
Black silicon with aspect ratios up to 10 and an average optical reflectance of only 2.5% over the whole absorbing spectral range was covered perfectly conformal with a transparent conductive oxide. The thin film was deposited by thermal ALD and exhibited a resistivity of 1.1 Ohm cm. This concept promises a new design for an efficient heterojunction silicon solar cell.
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