The factors defining the resolution limit and the conditions for obtaining images at atomic resolutions are briefly discussed. The construction and performance of a 400 kV analytical atom resolution electron microscope (AARM), and the functions of a n energy selecting microscope, X-ray micro-analysis, and on-line image processing systems are described. Some examples of applications of the AARM are shown.
Several DP systems have been discussed and evaluated with respect to dynamic evacuation under actual operating conditions of an electron microscope. As a result, a cascade DP system has been found to be the most reasonable for an electron microscope where the column is evacuated by the first DP backed by the second DP, and for the camera chamber by the second DP with a large volume foreline backed by a mechanical pump. A spectrum of the residual gases in an electron microscope with a cascade DP system indicates a very clean vacuum with hydrocarbon partial pressures of less than 3×10−7 Pa.
For the study of phase transformation and structure change of crystals at low temperature in atomic scale, flowing liquid He specimen cooling holder has been constructed. It was aimed to achieve the low temperature without giving any effects to the resolution and analytical function of JEM-4000EX such as X-ray detection system and goniometer functions. The pole piece of electron lens used in this experiment has the following functions, i.e. Cs=2.88mm Cc=2.69mm f=3.55mm and the resolution is 0.34nm. The present specimen stage can be tilted ±20 degrees to X- and Y-directions inside of this pole piece. In connection of double tilt mechanism and protection of heat loss, double layered bellows are fabricated at the entrance of driving mechanism. At this point every vibrations from outside of the microscope such as from pumping out system of introduced liquid helium (the pipe A in Fig. 1) would be extinguished. This mechanism is fabricated in the vacuum box (marked by B in Fig.1).
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