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In this paper, we propose a new wafer slicing method for silicon carbide(SiC). SiC is well-known as a difficult-to-cut material, and a conventional slicing via multi-wire saw becomes more difficult with increasing ingot size. To solve this problem, the multi-wire electrical discharge slicing (EDS) method is applied to 100 mm-square SiC polycrystalline block. We successfully obtained the average thickness of 385 μm for nine sliced plates by ten-wires EDS. The thickness variation was measured to be less than 11.2 μm. This is the first demonstration of ten-wires EDS for 100 mm-square SiC material.

The objective of this study is to realize high-speed electrical discharge machining (EDM) using a wide-bandwidth, high-precision, millimeter-stroke, 5-DOF controlled maglev local actuator. In this paper, we report on the EDM of 1mm diameter holes using the maglev local actuator, and discuss the relationships between machining speed, the bandwidth of the actuator and the control gain of the EDM system. The experimental results show that the machining speed using the maglev local actuator was improved as the bandwidth of the actuator and control gains of the EDM system increased.

The objective of this study is to realize high-speed and high-accuracy electrical discharge machining (EDM) of micro holes using a combination of a conventional EDM machine and a maglev local actuator. In this paper, the conventional EDM machine and the wide-bandwidth, high-precision, 5-DOF controlled maglev local actuator are combined and cooperatively controlled. Then to accelerate the debris ejection from the machined holes, the driving methods of the axial jump and radial vibration of the electrode are discussed. The experimental results show that the maglev local actuator can adjust the gap between the electrode and a workpiece speedily, and the machining speed is improved by 434.2%, compared with conventional EDM machine. Moreover, by the jump and the circular motion of the electrode, the debris ejection can be accelerated, the abnormal electrical discharge can be avoided, and the machining speed also is improved by 580.3%.

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