The objective of this study is to realize high-speed electrical discharge machining (EDM) using a wide-bandwidth, high-precision, millimeter-stroke, 5-DOF controlled maglev local actuator. In this paper, we report on the EDM of 1mm diameter holes using the maglev local actuator, and discuss the relationships between machining speed, the bandwidth of the actuator and the control gain of the EDM system. The experimental results show that the machining speed using the maglev local actuator was improved as the bandwidth of the actuator and control gains of the EDM system increased.
In this paper, we propose a new wafer slicing method for silicon carbide(SiC). SiC is well-known as a difficult-to-cut material, and a conventional slicing via multi-wire saw becomes more difficult with increasing ingot size. To solve this problem, the multi-wire electrical discharge slicing (EDS) method is applied to 100 mm-square SiC polycrystalline block. We successfully obtained the average thickness of 385 μm for nine sliced plates by ten-wires EDS. The thickness variation was measured to be less than 11.2 μm. This is the first demonstration of ten-wires EDS for 100 mm-square SiC material.
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