We have demonstrated DNA handling with micromachined nanotweezers that consist of a pair of opposing nanoprobes and integrated thermal expansion microactuators for changing the probe gap. The probe tips coated with a thin Al layer were dipped into a droplet of a solution containing lambda-DNA molecules labeled with fluorescence dye, and then an ac electric field was applied between probes for several seconds. DNA molecules were then captured between the probe tips and retrieved from the solution to the air. The DNA capture between the probe tips could be performed more successfully on the droplet surface than in the underwater region. We also conducted an observation of the retrieved DNA molecules by transmission electron microscope and found that the thickness of the retrieved DNA molecules under the condition of this experiment was approximately 21 nm when the time of the applied ac power (1 MHz, 20 Vpp) was 20 s.
We have developed new micromachined opposing nano probes for electrical measurement of Biomolecules.Since comb-drive micro actuators were integrated and connected to the nano probes electrically isolated from silicon piece, it will enables us to measure electro-mechanical characteristics of a biomolecule such as piezoelectricity. The pled plasma reactive ion etching apparatus (ICP-RIE). To obtain the tip radius of less than 10[nm] and to align two probe tips, new process sequence was designed by combining wet anisotropical etching of silicon with the ICP-RTE. Another type with probes directing outward was also developed.
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