Development of Nano Probes for Electrical Measurement of Biomolecules

Abstract

We have developed new micromachined opposing nano probes for electrical measurement of Biomolecules.Since comb-drive micro actuators were integrated and connected to the nano probes electrically isolated from silicon piece, it will enables us to measure electro-mechanical characteristics of a biomolecule such as piezoelectricity. The pled plasma reactive ion etching apparatus (ICP-RIE). To obtain the tip radius of less than 10[nm] and to align two probe tips, new process sequence was designed by combining wet anisotropical etching of silicon with the ICP-RTE. Another type with probes directing outward was also developed.