We have investigated the characteristics of InGaN/GaN blue light-emitting diodes (LEDs) with a Si d-doped GaN contact layer. The Si d-doping of the GaN contact layer in the devices could enhance the Si doping concentration and improve the lateral conductivity in the GaN : Si contact layer without cracking. The operating voltage and dynamic resistance of LEDs with a Si d-doped GaN contact layer were 3.65 V and 27 W at 20 mA, respectively. The operating voltage and dynamic resistance of conventional LEDs with a uniformly doped GaN : Si contact layer were 3.94 V and 32.3 W at 20 mA, respectively. Also, the leakage currents at a reverse bias of --10 V were 2.8 mA for d-doped LEDs and 29 mA for uniformly doped LEDs. However, emission properties such as electroluminescence spectra and output power were not largely affected by utilizing a d-doped GaN:Si contact layer in the devices.
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