The paper presents the results of an experimental study of the emission spectra of a gas discharge during high-power impulse magnetron sputtering. The influence of the repetition frequency and duration of current pulses on the intensity of the spectral lines of various particles is shown. The parameters of the gas-discharge plasma during HiPIMS and at a direct current were also compared.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.