Investigation of the influence of the parameters of a pulsed power source on the properties of a magnetron’s high-power gas discharge

Abstract

The paper presents the results of an experimental study of the emission spectra of a gas discharge during high-power impulse magnetron sputtering. The influence of the repetition frequency and duration of current pulses on the intensity of the spectral lines of various particles is shown. The parameters of the gas-discharge plasma during HiPIMS and at a direct current were also compared.