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The paper presents comparative results of NiTi corrosion resistance tests of the alloy in initial state and after oxidizing and oxynitriding in low temperature plasma. These processes allow obtaining TiO2 or composite TiO2 + TiN layers with a titanium nitride (TiN) interlayer. Corrosion resistance tests of diffusion layers produced on NiTi were carried out via electrochemical impedance spectroscopy and the potentiodynamic method in Ringer's solution at 37 °C. The results were complemented with analysis of the alloy's structure, surface topography, and elemental distribution in the layers. The results showed an increase in corrosion resistance of NiTi alloy both after glow-discharge oxidation and oxynitriding. Significant shortening of the passive range of oxynitrided layers may result both from differences in surface topography and the thickness of the oxide layers.