We designed and fabricated ultra-small photonic-crystal (PC)-waveguide (WG)-based components of straight-WGs, 60°-bends and Y-splitters, utilizing single-line-defect in the air-bridge type GaAs PC, and revealed their optical properties in detail by observing a transmittance (T) spectrum over a broad wavelength-region from 850 to 1600 nm. For this purpose, we developed a halogen-lamp-based spectrometer for an ultra-thin slab-sample, which has turned out very useful. We also calculated the corresponding T-spectrum by using three-dimensional finite-difference-time-domain method. In all cases where comparison is possible, the observed spectrum agrees essentially with the calculated one. Owing to these broad spectra, we have unambiguously identified the high-T region due to single guided-mode in the respective components. Comparisons of the spectrum between different samples or components, such as the straight-WGs with much different lengths, or the straight-WG and the sharp bend have also helped to reasonably interpret the observed spectra, allowing a comprehensive understanding of optical properties of those components. The propagation loss and the band width in each component could also be estimated from the comparison. The loss is estimated as 1.5 ±0.5 dB/mm for the straight-WG, while less than 1 dB/bend, if it exists, for the bend WG, and both band-widths are broader than 40 nm. We also find that the Y-splitter is capable of dividing light into two ports almost equally in intensity with a total transmittance of more than 85%; the band-width is broader than 40 nm. As a result, we have found that all those should be useful as key components in future ultra-fast planar optical integrated circuits.
The oxidation process applied to the fabrication of an oxide-cladding two-dimensional AlGaAs-based photonic crystal waveguide with tapered ridge waveguides is thoroughly investigated. Combining an extremely small amount of oxidation with the tapered ridge waveguides yielded the self-aligned selective oxidation without any masking layers. This tapered ridge waveguide with partial oxidation functions like a spot size converter that reduces propagation loss and, more importantly, lessens the significant strain induced by oxidation. On the other hand, satisfactory agreement between transmission measurements of fabricated samples and three-dimensional finite-difference time-domain calculations demonstrates the high quality of the photonic crystal slab waveguide.
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