AlN homoepilayers and heteroepilayers were grown on polar c-plane and nonpolar a-plane and m-plane orientations of AlN bulk and sapphire substrates by metal organic chemical vapor deposition. A systematic comparative study of photoluminescence properties of these samples revealed that all AlN homoepilayers ͑c, a and m planes͒ were strain free with an identical band gap of about 6.099 ͑6.035͒ eV at 10 ͑300͒ K, which is about 42 meV below the band gap of c-plane AlN heteroepilayers grown on sapphire. Also, nonpolar a-plane homoepilayers have the highest emission intensity over all other types of epilayers. We believe that a-plane AlN homoepilayers have the potential to provide orders of magnitude improvement in the performance of new generation deep UV photonic devices. © 2008 American Institute of Physics. ͓DOI: 10.1063/1.2965613͔ AlN has a complete solid solubility with GaN ͑Ref. 1͒ and emerged as an important semiconductor material for applications of light emitters down to 200 nm ͑Ref. 2͒ and detectors in the deep ultraviolet ͑DUV͒ and extreme UV spectral region. 3,4 Quantum wells ͑QWs͒ have been the device structure of choice for efficient III-nitride semiconductor based light emitters. 5,6 Conventional nitride c-plane multiple QW structures generate fixed sheet charges at the interfaces due to the spontaneous and piezoelectric polarization. 7-10 which induce internal electric fields, lead to carrier separation, and reduce the radiative recombination rate. Consequently, optoelectronic devices such as light emitting diodes and laser diodes based on heteroepitaxial c-plane oriented III-nitride materials possess reduced internal quantum efficiencies.There has been tremendous effort in the investigation of nonpolar a-plane and m-plane III-nitride epilayers 11 and optoelectronic devices with QW structures 9,10 to reduce the effects of internal electric fields. To achieve QW and other heterostructure based devices with improved performance, optical properties of epilayers grown on different orientations of available substrates have to be better understood. Furthermore, most previous studies on the fundamental band structures of AlN have been carried out for heteroepilayers grown on sapphires, which are plagued by lattice mismatch induced strain and high threading dislocation density, which significantly inhibited our ability for precisely determining the fundamental band structure parameters of AlN. In this work, we report a systematic comparative study of optical properties of both homoepitaxial and heteroepitaxial layers of AlN grown on polar c-plane as well as a-plane and m-plane orientations probed by DUV photoluminescence ͑PL͒.AlN bulk single crystal substrates were produced by sublimation crystal growth using polycrystalline AlN wafer as seeds and have a thickness of about 1 mm and an average grain size of about 2 ϫ 3 mm 2 . 12 The surface of AlN bulk crystal substrates was prepared by chemical mechanical polishing ͑done by NovaSiC͒ that provided a surface roughness of about 1 -4 nm. The dislocation density i...
Articles you may be interested inAlxGa1−xN-based solar-blind ultraviolet photodetector based on lateral epitaxial overgrowth of AlN on Si substrate Appl.Deep ultraviolet ͑DUV͒ avalanche photodetectors ͑APDs͒ based on an AlN / n-SiC Schottky diode structure have been demonstrated. The device with a mesa diameter of ϳ100 m exhibits a gain of 1200 at a reverse bias voltage of −250 V or a field of about 3 MV/ cm. The cut-off and peak responsivity wavelengths of these APDs were 210 and 200 nm, respectively. This is the highest optical gain and shortest cut-off wavelength achieved for III-nitride based DUV APDs. It was also observed that the reverse breakdown voltage increases with decreasing device size, which suggests that the device performance is limited by the presence of dislocations. The breakdown voltage for dislocation-free AlN was deduced to be about 4.1 MV/ cm. The present results further demonstrate the potential of AlN as an active DUV material for future optoelectronic device applications .
Photoluminescence (PL) spectroscopy and x-ray diffraction measurements were employed to study biaxial strain in AlN epilayers grown on different substrates. X-ray diffraction revealed that AlN epilayers grown on AlN bulk substrates (or homoepilayers) have the same lattice parameters as AlN bulk crystals and are almost strain-free. Compared to the free exciton (FX) transition in an AlN homoepilayer, the FX line was 31meV higher in AlN/sapphire due to a compressive strain and 55 (69)meV lower in AlN∕SiC (AlN∕Si) due to a tensile strain. A linear relationship between the FX transition energy peak position and in-plane stress was obtained, and a value of 45meV∕GPa for the linear coefficient of the stress-induced bandgap shift in AlN epilayers was deduced. The work here establishes PL as another simple and effective method for monitoring the biaxial stress in AlN epilayers.
Deep ultraviolet (DUV) Schottky barrier photodetectors have been demonstrated by exploiting the epitaxial growth of high quality AlN epilayer on n-type SiC substrate. The fabricated AlN∕n-SiC hybrid Schottky barrier detectors exhibited a peak responsivity at 200nm with very sharp cutoff wavelength at 210nm, very high reverse breakdown voltages (>200V), very low dark currents (about 10fA at a reverse bias of 50V), and high responsivity and DUV to UV/visible rejection ratio. These outstanding features are direct attributes of the fundamental material properties and high quality of AlN epilayers. The fabricated photodetectors also have a thermal energy limited detectivity at zero bias of about 1.0×1015cmHz1∕2W−1. These results demonstrated that AlN epilayers are an excellent candidate as an active material for DUV optoelectronic device applications.
A set of AlN∕AlxGa1−xN (x∼0.65) quantum wells (QWs) with well width Lw varying from 1to3nm has been grown by metal organic chemical vapor deposition. Low temperature photoluminescence (PL) spectroscopy has been employed to study the Lw dependence of the PL spectral peak position, emission efficiency, and linewidth. These results have shown that these AlN∕AlGaN QW structures exhibit polarization fields of ∼4MV∕cm. Due to effects of quantum confinement and polarization fields, AlN∕AlGaN QWs with Lw between 2 and 2.5nm exhibit the highest quantum efficiency. The dependence of the emission linewidth on Lw yielded a linear relationship. The implications of our results on deep ultraviolet optoelectronic device applications are also discussed.
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