2007
DOI: 10.1063/1.2752126
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Hybrid AlN–SiC deep ultraviolet Schottky barrier photodetectors

Abstract: Deep ultraviolet (DUV) Schottky barrier photodetectors have been demonstrated by exploiting the epitaxial growth of high quality AlN epilayer on n-type SiC substrate. The fabricated AlN∕n-SiC hybrid Schottky barrier detectors exhibited a peak responsivity at 200nm with very sharp cutoff wavelength at 210nm, very high reverse breakdown voltages (>200V), very low dark currents (about 10fA at a reverse bias of 50V), and high responsivity and DUV to UV/visible rejection ratio. These outstanding features are… Show more

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Cited by 46 publications
(26 citation statements)
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“…Although Dahal et al reported in 2007 on a Schottky barrier photodiode of AlN grown on n-SiC [8], no measurements were made in the VUV region (< 200 nm).…”
Section: Introductionmentioning
confidence: 93%
“…Although Dahal et al reported in 2007 on a Schottky barrier photodiode of AlN grown on n-SiC [8], no measurements were made in the VUV region (< 200 nm).…”
Section: Introductionmentioning
confidence: 93%
“…6͒ and metalsemiconductor-metal and Schottky barrier photodetectors for DUV and extreme UV device applications. [7][8][9] The availability of device quality AlN epilayers also opens up new opportunities for probing fundamental parameters in AlN to a degree previously unattainable. Due to the ionic nature of III-nitrides, Frohlich interaction, which is the Coulomb interaction between electrons ͑holes͒ and longitudinal electric field produced by the zone-center longitudinal optical ͑LO͒ phonons, is stronger compared to deformation-potential or piezoelectric interaction in these materials.…”
Section: Probing Exciton-phonon Interaction In Aln Epilayers By Photomentioning
confidence: 99%
“…Among them, SiC (Wright & Horsfall 2007), GaN (Monroy et al 1999) and II-VI compound-based detectors (Sou et al 2001) show a photodetector cut-off wavelength longer than 300 nm, whereas cBN , AlN (Butun et al 2006;Li et al 2006;Dahal et al 2007;BenMoussa et al 2008) and diamond-based (Adam et al 2004;Balducci et al 2005 By their nature, cBN, AlN and diamond semiconductors are the primary choice as the photosensitive materials for solar EUV and VUV photon detection (spectral range of interest 10 k 200 nm) and meet the requirements for UV radiometers planned to study the Sun since they provide high radiation hardness, near-ultraviolet (NUV) and visible-blindness (wavelength cut-off value 225 nm), mechanical, chemical and thermal stability and no need of cooling system (i.e., roomtemperature operation).…”
Section: Photodetectorsmentioning
confidence: 99%