2009
DOI: 10.1002/pssc.200880876
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UV/VUV photodetectors using group III‐nitride semiconductors

Abstract: Schottky barrier photodiodes based on AlN, AlxGa1–xN, GaN, and InyGa1–yN were fabricated with different compositions. In addition, novel types of UV detectors with narrow spectral bandwidths were developed by combining AlxGa1–xN Schottky barrier photodiodes and optical entrance windows made of AlyGa1–yN having exactly or nearly the same composition (y ≥ x). Their spectral responsivities were measured in the spectral range including the vacuum ultraviolet region. The results showed that the devices having a wid… Show more

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Cited by 11 publications
(7 citation statements)
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“…Their spectral responsivity can be tailored for specific applications by bandgap engineering of the Al x Ga 1-x N layers and in-situ integration of filter layers during Manuscript the epitaxial growth process. Results in the field of Al x Ga 1-x N photodetectors can be found in the literature [1]- [5]. Several results focused on small area pixels of less than 0.03 mm² are published by several groups [6]- [10].…”
Section: Introductionmentioning
confidence: 99%
“…Their spectral responsivity can be tailored for specific applications by bandgap engineering of the Al x Ga 1-x N layers and in-situ integration of filter layers during Manuscript the epitaxial growth process. Results in the field of Al x Ga 1-x N photodetectors can be found in the literature [1]- [5]. Several results focused on small area pixels of less than 0.03 mm² are published by several groups [6]- [10].…”
Section: Introductionmentioning
confidence: 99%
“…Let us mention, for example, the problem of the cBN doping, which needs further investigation. The spectral window of such new detectors, as presented by Saito et al (2009), is also extremely temperature-dependent. Finally, we are still lacking a complete end-to-end test of their degradation.…”
Section: Resultsmentioning
confidence: 99%
“…For the MUV range, we consider a new detector architecture that selects the required passbands by using different materials: aluminium nitride (AlN) and gallium nitride (GaN) with a different stoichiometry (Saito et al 2009). Because of the particular architecture, no additional windows on the detectors need to be considered for limiting the short wavelength contribution.…”
Section: Which Instrument For the Future?mentioning
confidence: 99%
“…A number of developments for better stability and solar-blindness have been reported by using various kind of wide bandgap materials like diamond (Saito, T. et al, 2005a;Saito, T. et al, 2005b;Saito, T. et al, 2006), AlN, AlGaN, InGaN etc. (Saito, T. et al, 2009a;Saito, T. et al, 2009b). To check the validity of the calculation model described in Chapter 3, a number of comparisons have been conducted in the wide wavelength range from 10 nm to 1000 nm.…”
Section: Spectral Properties Of Photodiodesmentioning
confidence: 99%