The authors present a systematic study showing the evolution of the defect morphology and crystalline quality in molecular beam epitaxially grown HgTe epilayers with substrate temperature. The authors have characterized the layers using optical microscopy, atomic force microscopy, scanning electron microscopy, energy dispersive x-ray spectroscopy, and high-resolution x-ray diffraction. Four types of defects (microvoids, circular voids, hillocks, and high-temperature voids) have been characterized on epilayers grown in the substrate temperature range of 183.3–201.3 °C. The authors find that there is a minimum in the area covered by defects at a temperature just below the onset of Te precipitation, and they define this temperature as the optimal growth temperature. Above the optimal growth temperature the authors observe the appearance of high-temperature voids. By determining the onset of Te precipitation in HgTe, and performing thermodynamic calculations, the authors can also successfully predict the onset of Te precipitation in CdHgTe, which again is related to the optimal growth temperature in CdHgTe. Furthermore, the authors have found that the shape and density of the microvoids are particularly sensitive to the substrate temperature, and that these properties can be used to determine the deviation from the optimal growth temperature. From the shape and density of microvoids in one growth of HgTe, the authors can therefore determine the temperature correction needed to reach the optimal growth temperature for CdHgTe. The authors also suggest a mechanism for the formation of the microvoids based on the assumption of impurities on the substrate combined with a preferential Te diffusion in the [1 ¯11] direction across the steps.
A systematic study of the evolution of the defect morphology and crystalline quality in molecular beam epitaxially grown CdxHg1−xTe epilayers with growth temperature is presented. The layers were characterized with optical microscopy, atomic force microscopy, scanning electron microscopy, energy dispersive x-ray spectroscopy, and high-resolution x-ray diffraction. Four types of defects (microvoids, hillocks, high-temperature voids, and needles) were characterized on epilayers grown in the growth temperature range 188.9−209.9 °C. There is a minimum in the area covered by defects at a temperature just below the onset of Te precipitation, which is defined as the optimal growth temperature. Microvoids with various shapes, and at various stages of growth, were observed side-by-side in many of the CdxHg1−xTe layers, along with hillocks and needles. The defect density of microvoids changes by several orders of magnitude in the studied temperature range. A mechanism for the formation of microvoids and needles is suggested. High-temperature voids associated with Te precipitates appear above the optimal growth temperature. The onset of Te precipitation is well described by a thermodynamic model.
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The defect morphology in HgTe and CdHgTe was studied in (211)B-oriented layers grown in a 20°C temperature range around the optimal growth temperature. The density of defects varies strongly with the growth temperature. In HgTe, the shape of the microvoid defects is very sensitive to the growth temperature and can be used to determine the deviation from the optimal growth temperature. Using thermodynamical modeling, the optimal growth temperature for CdHgTe can then be calculated. We describe a mechanism for the formation of microvoids and needles which involves preferential surface diffusion of Te combined with an impurity or defect on the substrate. Microvoids on (111)B-oriented partially twinned HgTe layers were also studied. The microvoids in the twinned parts of the layer were found to be rotated 180 deg relative to the untwinned parts of the layer.
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