Adapting classical spectroscopic methods to the new challenge of studying nanomaterials, imaging techniques are the trendsetter in recent years. Among them is scanning photoelectron microscopy (SPEM) with submicron spatial resolution, where the sample surface is raster-scanned by a focused soft X-ray beam, and the emitted photoelectrons are collected at each point by the input optics of an electron energy analyzer. We have constructed such a station at SRRC in Taiwan, which is now fully in operation. In this paper, we introduce the specific features of the instrument and discuss application examples on the characterization of scanning-probe-induced Si3N4 to SiOx conversion and electron-and plasma-induced chemical changes in alkanethiols self-assembled monolayers. In combining two-dimensional imaging and micro-photoemission, SPEM can reveal valuable information on the chemical and electronic properties of structured and multiphase materials.

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The optical design and performance of the recently opened 13A biological small-angle X-ray scattering (SAXS) beamline at the 3.0 GeV Taiwan Photon Source of the National Synchrotron Radiation Research Center are reported. The beamline is designed for studies of biological structures and kinetics in a wide range of length and time scales, from angstrom to micrometre and from microsecond to minutes. A 4 m IU24 undulator of the beamline provides high-flux X-rays in the energy range 4.0–23.0 keV. MoB4C double-multilayer and Si(111) double-crystal monochromators (DMM/DCM) are combined on the same rotating platform for a smooth rotation transition from a high-flux beam of ∼4 × 1014 photons s−1 to a high-energy-resolution beam of ΔE/E ≃ 1.5 × 10−4; both modes share a constant beam exit. With a set of Kirkpatrick–Baez (KB) mirrors, the X-ray beam is focused to the farthest SAXS detector position, 52 m from the source. A downstream four-bounce crystal collimator, comprising two sets of Si(311) double crystals arranged in a dispersive configuration, optionally collimate the DCM (vertically diffracted) beam in the horizontal direction for ultra-SAXS with a minimum scattering vector q down to 0.0004 Å−1, which allows resolving ordered d-spacing up to 1 µm. A microbeam, of 10–50 µm beam size, is tailored by a combined set of high-heat-load slits followed by micrometre-precision slits situated at the front-end 15.5 m position. The second set of KB mirrors then focus the beam to the 40 m sample position, with a demagnification ratio of ∼1.5. A detecting system comprising two in-vacuum X-ray pixel detectors is installed to perform synchronized small- and wide-angle X-ray scattering data collections. The observed beamline performance proves the feasibility of having compound features of high flux, microbeam and ultra-SAXS in one beamline.