We present a novel design for a high quality (Q)-factor, nonlinear planar photonic crystal (PhC) nanocavity incorporating a silicon/polymer material that is well suited to ultrafast all-optical switching. The hybrid nanocavity is created in the centre of a triangular lattice planar PhC made from silicon using the three-missing-holes point defect (L3). It is formed by infiltrating the air hole array of the PhC with polymer and by depositing a polymer layer on top of a PhC membrane. To determine the hybrid nonlinear cavity performance, we analyze the dependence of the refractive index (RI) of the top cladding on the Q-factor and resonant wavelength. The results show that, when the top cladding RI is increased from 1.5 to 1.6, corresponding to that of polymer materials, the Q-factor decreases markedly (Q < 10 3 ). Optimization of the hybrid nonlinear silicon/polymer cavity design by modulating the structure parameters yields a high Qfactor of 54 000 with a small modal volume across the telecommunications band. In addition, the field distribution of the resonant mode indicates that the radiation loss is sufficiently small. Due to the overwhelmingly large Kerr nonlinearity of polymer over silicon, this structure configuration design shows considerable promise as regards the realization of ultrafast response speed in small-sized all-optical switching integrated devices.

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