In this paper, we propose a multilayered capacitive biosensor and evaluate the feasibility of using capacitance as a metric for sensing target biomolecules. The structure has been modeled using the IntelliSuite software. Consideration of distinct values of dielectric constants for different
biomolecules makes it a suitable parameter for capacitive biosensor applications. The structure consists of nanogap cavities that act as the sensing sites. The concept of dielectric modulation has been employed for detecting the change in capacitance due to change in the dielectric constant
of the cavity. We have used two biomolecules, biotin and APTES for the analysis. This paper highlights new opportunities for identification of biomolecules using MEMS-based dielectric modulated biosensors.
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