The technique of the chemical spray pyrolysis has been employed to deposit Nickel Phthalocyanine (NiPc) on different substrate types at temperatures 150 °C to investigate their structural, Scanning Electron Micrographs, X-ray diffractograms and optical properties. The results of X-ray diffraction show that structure of the powder is polycrystalline with monoclinic structure, and the results of XRD for a thin film of NiPc shows polycrystalline with a fairly weak degree of crystallization, SEM revealed that the surface of the film is usually homogeneous, the roughness of NiPc films was evaluated by AFM technique and the results showed that the grain size increases with increasing of concentration. The optical measurement using UV-Visible Spectra showed that the NiPc thin films have an optical constant like the absorption coefficient and have a direct energy gap for all samples.
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