The heteroepitaxial growth of III-V compound semiconductors on Si would enable the integration of high-performance III-V materials with Si technology. We report epitaxial growth on (111)-oriented Si surfaces of highly aligned, single crystalline InP nanowires by chemical vapor deposition catalyzed by Au. We demonstrate laterally oriented InP nanowires bridging between vertical (111) Si surfaces formed by anisotropically etching a (110)-oriented Si substrate or the top Si layer of a silicon-on-insulator wafer. This method of connecting nanowires offers a facile way of integrating nanoscale III-V optoelectronic and photonic devices with Si.
Lateral epitaxial overgrowth of GaSb on GaSb and GaAs substrates patterned with SiO2 or Si3N4 films by metalorganic chemical vapor deposition was accomplished using trimethylgallium and trimethylantimony. Transmission electron microscopy measurements show that coalesced films grown on GaSb substrates exhibit defect-free materials, while those on GaAs substrates show regular, small-angle crystal tilting originating from large lattice mismatch.
Oriented crystallization of GaSb on patterned, oxidized Si substrates was achieved by metalorganic chemical vapor deposition. The Si substrate was formed by patterning an array of inverted square pyramids having ͕111͖ sidewall facets, using lithography and anisotropic etching in KOH. The orientation and structure of GaSb crystals, at various stages of the growth, were examined by scanning electron microscopy and x-ray diffraction. X-ray diffraction pole figure analysis shows that ͕111͖ planes of GaSb are predominantly parallel to the ͕111͖ planes of the inverted pyramids. Extra ͑111͒ spots observed in the x-ray diffraction pole figure are interpreted in terms of multiple twinning of GaSb.
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