Selective Area Epitaxy on Structures and Surfaces

Selective Area Masked Growth (Nano to Micro)

“…There are two basic types of SAG [1,2]. The first type of SAG uses a dielectric insulating mask to inhibit the deposition of materials wherever the mask is present [3].…”

“…The first type of SAG uses a dielectric insulating mask to inhibit the deposition of materials wherever the mask is present [3]. Polycrystalline growth on the mask can be avoided by choosing a halogen-based precursor and suitable growth conditions [2,[4][5][6]. In practice, polycrystalline deposition may occur on the insulating mask.…”