We have studied the effect of H2 dilution on the growth of polycrystalline silicon (poly-Si) using SiF4/SiH4/H2 by a remote plasma chemical vapor deposition. With an increase of H2 dilution ratio the grain size decreases and the polycrystalline fraction increases, probably due to enhancement of the nucleation rate with H2 flow rate. We have deposited polycrystalline silicon films with a crystalline fraction of 89% at a substrate temperature of 330 °C. The peak of the deconvoluted Raman spectrum contributed from the microcrystalline (or amorphous) Si portion in the deposited poly-Si film increases and the full width at half maximum decreases with increasing H2 flow rate.
The electrical and optical properties of the hydrogenated amorphous silicon (a-Si:H) films deposited by inductively coupled plasma (ICP) chemical vapor deposition (CVD) have been investigated. The ICP-CVD a-Si:H films deposited at the pressure of 30 mTorr exhibited the hydrogen content of 17 at. %, a photosensitivity of 106 at 100 mW/cm2 and a conductivity activation energy of 0.9 eV. A novel coplanar self-aligned a-Si:H thin film transistor was fabricated using Ni-silicide gate and source/drain electrodes. The simultaneous Ni-silicide formation of gate and source/drain regions using the stacked layers of thin a-Si:H, silicon nitride (SiNx) and a-Si:H reduces the offset length between gate and source/drain, which leads to the coplanar a-Si:H thin film transistor (TFT). This self-aligned a-Si:H TFT exhibited a field effect mobility of 0.44 cm2/V s, threshold voltage of 5.3 V and subthreshold slope of 0.5 V/dec. The coplanar geometry reduces the parasitic capacitance and parasitic resistance compared with those of conventional staggered a-Si:H TFTs.
Amorphous InGaZnO 4 (a-IGZO) thin film transistors (TFTs) are promising devices in backplane technology. Since a-IGZO TFTs are very sensitive to the fabrication processes, they need stable process to keep their initial deposition properties. Herein we improved the stability of a-IGZO by applying N 2 O plasma. The stability characteristic of a-IGZO TFT was improved with N 2 O plasma. V th shift was 1.5V for 10,000s under NBTS with illumination which was the best result in the world.
Abstract. We will prove that if f is a polynomial of even degree then the Fourier transform F (e −f )(ξ) can be estimated by e − f * (ξ) where f * (ξ) is the Legendre). This result was previously proved by H. Kang [K] for a case of a convex polynomial which is a finite sum of monomials of even order with positive coefficients. Our result is the most general one for the polynomial f (x) since the convexity condition is not imposed and e −f (x) belongs to the space L 1 if and only if f (x) is a polynomial of even degree with the coefficient of the highest degree a 2m > 0. Also, we will make a more precise estimate of constants.
We have grown microcrystalline silicon by a remote plasma chemical vapor deposition technique using silane and helium only, without hydrogen dilution. The optimum growth temperature and rf power are 330 °C and 100 W, respectively. These results indicate that an atomic hydrogen environment on the growing surface is not always necessary to grow microcrystalline (μc-)Si at low temperatures. It is found that the exposure of He plasma on the growing surface of μc-Si etches the Si layer, explaining the growth of μc-Si by using only silane and He and no hydrogen.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.