In this paper, we studied stiction behavior of HAR pattern (line and space pattern) dependence on adhesion force with surface tension of drying liquid and surface contact angle. Surface tension effect was evaluated with various drying liquids such as IPA, ethanol and HFE (hydrofluoroether) chemical. Patterns treated by dHF, APM and surface modifier were introduced to investigate dependence of pattern collapse on contact angle. The high temperature D.I. water rinse followed by high temperatures drying using liquid with low surface tension was a most effective. Furthermore, surface modification method using HMDS (hexamethyldisilazane) chemical was also effective.

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β-silicon carbide whiskers have been synthesized on a carbon fabric by a vapor-solid (VS) mechanism using the Chemical Vapor Infiltration (CVI) process. Optimum processing conditions for SiC whisker growth were determined by mapping of SiC deposition behavior. SiC was deposited on a carbon fabric substrate as a film or whiskers, depending on processing conditions. The mean diameter and line density of the whiskers was the highest at an input gas ratio of 50. As temperature increases, the mean diameter of the whiskers increased and the line density of whiskers decreased. In the optimum processing conditions, whiskers grew uniformly with high growth density and formed a networking structure between each of the carbon filaments resulting in a structure suitable for filter applications.

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SiC:H films were produced in a remote plasma enhanced chemical vapor deposition (RPE-CVD) system. The HMDS was chosen as the primary source gas and was fixed at constant flow rate of 10 sccm. The C 2 H 2 gas input amount was varied from 3 to 200 sccm for the study of carbon effect on the film stoichiometry and bonding properties. The deposition temperature of the substrate was fixed at 400 • C, and the plasma power was fixed at 300 W. Using auger electron spectroscopy, the depth profile of the film was investigated with C 2 H 2 flow rate changes. The C 2 H 2 played an important role in the transition between sp 2 and sp 3 carbon hybridization bonds, which affected the growth behavior and properties of the films.