This paper presents preliminary results towards the development of a micromachined acoustic energy harvester for aeroacoustic applications. The acoustic energy harvester employs a circular, piezoelectrically active diaphragm for acousticalto-mechanical and mechanical-to-electrical transduction. Lumped element modeling, design, fabrication, and characterization of a micromachined acoustic energy harvester prototype are presented. Results indicate a maximum output power density of 0.34 2 W cm µ at 149 using currently fabricated devices and suggest a possible output power density, for this design, of 252 dB SPL 2 W cm µ with improved fabrication conditions.

This paper presents the development of an acoustic energy harvester using an electromechanical Helmholtz resonator (EMHR). The EMHR consists of an orifice, cavity, and a piezoelectric diaphragm. Acoustic energy is converted to mechanical energy when sound incident on the orifice generates an oscillatory pressure in the cavity, which in turns causes the vibration of the diaphragm. The conversion of acoustic energy to electrical energy is achieved via piezoelectric transduction in the diaphragm of the EMHR. Moreover, the diaphragm is coupled with energy reclamation circuitry to increase the efficiency of the energy conversion. Lumped element modeling of the EMHR is used to provide physical insight into the coupled energy domain dynamics governing the energy reclamation process. The feasibility of acoustic energy reclamation using an EMHR is demonstrated in a plane wave tube for two power converter topologies. The first is comprised of only a rectifier, and the second uses a rectifier connected to a flyback converter to improve load matching. Experimental results indicate that approximately 30 mW of output power is harvested for an incident sound pressure level of 160 dB with a flyback converter. Such power level is sufficient to power a variety of low power electronic devices.

This paper presents an analytical two-port, lumped-element model of a piezoelectric composite circular plate. In particular, the individual components of a piezoelectric unimorph transducer are modeled as lumped elements of an equivalent electrical circuit using conjugate power variables. The transverse static deflection field as a function of pressure and voltage loading is determined to synthesize the two-port dynamic model. Classical laminated plate theory is used to derive the equations of equilibrium for clamped circular laminated plates containing one or more piezoelectric layers. A closed-form solution is obtained for a unimorph device in which the diameter of the piezoelectric layer is less than that of the shim. Methods to estimate the model parameters are discussed, and model verification via finite-element analyses and experiments is presented. The results indicate that the resulting lumpedelement model provides a reasonable prediction (within 3%) of the measured response to voltage loading and the natural frequency, thus enabling design optimization of unimorph piezoelectric transducers.

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This paper describes the design, fabrication, and characterization of a bulk-micromachined piezoelectric microphone for aeroacoustic applications. Microphone design was accomplished through a combination of piezoelectric composite plate theory and lumped element modeling. The device consists of a 1.80-mm-diam, 3-microm-thick, silicon diaphragm with a 267-nm-thick ring of piezoelectric material placed near the boundary of the diaphragm to maximize sensitivity. The microphone was fabricated by combining a sol-gel lead zirconate-titanate deposition process on a silicon-on-insulator wafer with deep-reactive ion etching for the diaphragm release. Experimental characterization indicates a sensitivity of 1.66 microVPa, dynamic range greater than six orders of magnitude (35.7-169 dB, re 20 microPa), a capacitance of 10.8 nF, and a resonant frequency of 59.0 kHz.