A MEMS acoustic energy harvester

Horowitz, Stephen; Sheplak, Mark; Cattafesta, Lou; Nishida, Toshikazu

doi:10.1088/0960-1317/16/9/s02

Cited by 216 publications

(147 citation statements)

References 12 publications

Supporting

Mentioning

135

Contrasting

Order By: Relevance

“…Another approach is to use piezoelectric materials to convert mechanical strain into electrical energy. For instance, several authors have investigated piezoelectric devices that harvest energy from impact, vibration, and acoustic sources [5,[10][11][12]. Induction is a third approach that may be used to convert environmental energy into electrical energy.…”

Section: Introductionmentioning

confidence: 99%

Energy harvesting from the nonlinear oscillations of magnetic levitation

Mann

Sims

2009

Journal of Sound and Vibration

840

566

View full text Add to dashboard Cite

This paper investigates the design and analysis of a novel energy harvesting device that uses magnetic levitation to produce an oscillator with a tunable resonance. The governing equations for the mechanical and electrical domains are derived to show the designed system reduces to the form of a Duffing oscillator under both static and dynamic loads. Thus, nonlinear analyses are required to investigate the energy harvesting potential of this prototypical nonlinear system. Theoretical investigations are followed by a series of experimental tests that validate the response predictions.The motivating hypothesis for the current work was that nonlinear phenomenon could be exploited to improve the effectiveness of energy harvesting devices.

show abstract

Section: Introductionmentioning

confidence: 99%

Energy harvesting from the nonlinear oscillations of magnetic levitation

Mann

Sims

2009

Journal of Sound and Vibration

840

566

View full text Add to dashboard Cite

show abstract

“…Recently, duToit et al [25] provided in-depth design principles for MEMS-scale piezoelectric energy harvesters and proposed a prototype of 30 µW cm −3 from low-level vibration. Related works on the modelling of miniaturized piezoelectric power harvesting devices can be found in [26][27][28].…”

Section: Introductionmentioning

confidence: 99%

Efficiency of energy conversion for a piezoelectric power harvesting system

Shu

Lien

2006

J. Micromech. Microeng.

282

204

View full text Add to dashboard Cite

This paper studies the energy conversion efficiency for a rectified piezoelectric power harvester. An analytical model is proposed, and an expression of efficiency is derived under steady-state operation. In addition, the relationship among the conversion efficiency, electrically induced damping and ac-dc power output is established explicitly. It is shown that the optimization criteria are different depending on the relative strength of the coupling. For the weak electromechanical coupling system, the optimal power transfer is attained when the efficiency and induced damping achieve their maximum values. This result is consistent with that observed in the recent literature. However, a new finding shows that they are not simultaneously maximized in the strongly coupled electromechanical system.

show abstract

“…The choice of the piezoelectric thin film material also depends on deposition methods, process complexity and CMOS compatibility. Common piezoelectric thin films are zinc oxide (ZnO), aluminium nitride (AlN), and lead zicronate titanate (PZT) (Horowitz 2005). Table 1 shows that PZT provides highest coupling and strain coefficient compared to ZnO and AlN thin films.…”

Section: Piezoelectric Working Principlementioning

confidence: 99%

Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

et al. 2011

View full text Add to dashboard Cite

Energy harvesters based on acoustic vibration sources can generate electrical power through piezoelectric transduction. Significant miniaturization of electro mechanical devices using MEMS fabrication technology has encouraged the creation of portable, miniature energy harvesters. A niche application is aero acoustics, where wasted, high dB and high frequency sound generated by aircrafts are transformed into useful energy. Having selfpowered, miniature acoustic sensors allows noise detection monitoring systems to be self-sustaining. This paper illustrates an Aluminium doped Zinc Oxide (AZO) cantilever beam on stainless steel substrate with a top copper electrode. Design and finite element modelling of the design was conducted using Coventorware TM . The AZO piezoelectric thin film was RF-sputtered on the stainless steel substrate. Characterizations were performed using X-ray diffraction (XRD) and scanning electron microscopy (SEM) to evaluate the piezoelectric qualities and surface morphology, respectively. Experimental measurements indicate approximately 345.4 mV AC output voltage (open circuit voltage) is produced at vibration frequencies of 30 kHz. This is in accordance with the Coventorware TM simulation results. This measured power level is sufficient to power a miniature wireless acoustic sensor nodes to monitor noise generated by aircrafts.

show abstract

A MEMS acoustic energy harvester

Cited by 216 publications

References 12 publications

Energy harvesting from the nonlinear oscillations of magnetic levitation

Energy harvesting from the nonlinear oscillations of magnetic levitation

Efficiency of energy conversion for a piezoelectric power harvesting system

Design, simulation and fabrication of piezoelectric micro generators for aero acoustic applications

Contact Info

Product

Resources

About