Photonic integrated circuits (PICs) are considered as the way to make photonic systems or subsystems cheap and ubiquitous. PICs still are several orders of magnitude more expensive than their microelectronic counterparts, which has restricted their application to a few niche markets.
In this paper, we present a study of integrated optical delay lines (DLs) for application in optical time-division multiplexers. The investigated DLs are formed by spirally folded waveguides. The components were designed in a generic approach and fabricated in multi-project wafer runs on an InP-based platform. The design process and rules, together with characterization results of test structures, are discussed. Static and dynamic measurements were performed for verification of the DLs' performance in the wavelength and time domain. Additionally, a comparison between the simulation and characterization results is given, which confirms good agreement between measured and designed values.
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The fabrication processes for silicon nitride photonic integrated circuits evolved from microelectronics components technology—basic processes have common roots and can be executed using the same type of equipment. In comparison to that of electronics components, passive photonic structures require fewer manufacturing steps and fabricated elements have larger critical dimensions. In this work, we present and discuss our first results on design and development of fundamental building blocks for silicon nitride integrated photonic platform. The scope of the work covers the full design and manufacturing chain, from numerical simulations of optical elements, design, and fabrication of the test structures to optical characterization and analysis the results. In particular, technological processes were developed and evaluated for fabrication of the waveguides (WGs), multimode interferometers (MMIs), and arrayed waveguide gratings (AWGs), which confirmed the potential of the technology and correctness of the proposed approach.
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