This paper presents the characterization of two prototyped fully integrated 62+62 row-column-addressed (RCA) 2-D transducer array probes, which are based on capacitive micromachined ultrasonic transducer (CMUT) and on piezoelectric transducer (PZT) technology, respectively. Both transducers have integrated apodization to reduce ghost echoes and were designed with similar acoustical features i.e. 3 MHz center frequency, λ /2-pitch and 24.8 × 24.8 mm 2 active footprint. The transducer arrays were assembled in a 3-D printed probe handle with electromagnetic shield and integrated electronics for driving the 128-channel coaxial cable to the scanner. The electronics were designed to allow all elements, both rows and columns, to be used interchangeably as either transmitters or receivers. The transducer characterization i.e. bandwidth, phase delay, surface pressure, sensitivity, insertion loss, and acoustical crosstalk, were based on several single element measurements, including pressure and pulse-echo, and were evaluated quantitatively and comparatively. The weighted center frequency was 3.0 MHz for both probes and the measured −6 dB fractional bandwidth was 109 ± 4% and 80 ± 3% for the CMUT and the PZT probe, respectively. The surface pressures of the CMUT and PZT were 0.55 ± 0.06 MPa and 1.68 ± 0.09 MPa, respectively, and the receive sensitivities of the rows (receiving elements) were 12.9 ± 0.7 µV/Pa and 13.7 ± 2.1 µV/Pa.
Abstract-A protective layer is necessary for Capacitive Micromachined Ultrasonic Transducers (CMUTs) to be used for imaging purpose. The layer should both protect the device itself and the patient while maintaining the performance of the device. In this work Sylgard 170 PDMS is tested as coating material for CMUTs through comparison of transmit pressure and receive sensitivity in immersion of coated and uncoated elements. It is seen that the transmitted pressure decreases with 27% and the receive sensitivity decreases 35 % when applying the coating using a dam and fill principle. This matches well with the estimated value of 31 %. With the coating, the center frequency was found to be decreased from 4.5 MHz to 4.1 MHz and the fractional bandwidth was increased from 77 % to 84 % in transmit. In receive the center frequency was found to decrease from 4.4 MHz to 3.9 MHz and the fractional bandwidth was decreased from 108 % to 92 %, when applying the PDMS coating.
Abstract-The harmonic imaging mode is today a fundamental part of ultrasound imaging; it is not only used for suppressing the grating lobe artifact, but also to reduce many other acoustical artifacts in the ultrasound image. A vital performance parameter for accepting CMUT probes as a clinical usable transducer technology is, that it can support harmonic imaging. The large bandwidth of the CMUT is a clear advantage for harmonic imaging, but the inherent nonlinear behavior of the CMUT poses an issue as it is difficult to dissociate the harmonics generated in the tissue from the harmonic content of the transmitted signal. This work presents how proper pulse coding of a bipolar pulser, which is present in most commercial ultrasound scanners, can reduce the intrinsic generated harmonic to fundamental pressure amplitude ratio to below −35 dB, making CMUT probes usable for clinical applications.
Abstract-This paper presents an experimental study of the acoustic performance of Capacitive Micromachined Ultrasonic Transducers (CMUTs) as function of plate dimensions. The objective is to increase the output pressure without decreasing the pulse-echo signal. The CMUTs are fabricated with a LOCOS process, followed by direct wafer fusion bonding to a SiliconOn-Insulator (SOI) wafer. In this way, the plate thickness is determined by the SOI wafer device layer thickness, resulting in CMUTs with plate thicknesses of 2, 9.3 and 15 µm. The corresponding radii and gap heights resulting in an immersion frequency of 5 MHz and a pull-in voltage of 200 V are obtained using finite element analysis. Hydrophone and plane reflector measurements are used to assess the acoustic performance. Increasing the plate thickness from 2 µm to 15 µm decreases the pulse-echo bandwidth from >100% to 30%. A maximum in both peak-to-peak output pressure and pulse-echo signal is obtained for the 9.3 µm plate, which still has a moderate pulseecho bandwidth of 60%. The 9.3 µm plate results in a 1.9 times higher peak-to-peak output pressure and a 3.6 times higher pulse-echo signal compared to the 2 µm plate. By adjusting the plate dimensions of a CMUT it is possible to optimize its acoustic performance for medical imaging applications, including visualization of deeper structures in the body, as well as nonlinear imaging such as tissue harmonic imaging.
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