This study was set out to investigate the emission characteristics of HCl (in both particle (HCl p ) and gaseous (HCl g ) forms), and Cl 2 during the trichlorosilane (TCS) burning process under various relative humidity conditions (RH; range = 55%-90%) which might exist at its storage area. All experiments were conducted in a test chamber. We found that , emitted from the TCS burning process for the all selected RH conditions. The particle sizes of HCl p fell to the range of the accumulation mode (MMADs = 0.808-1.04 μm; GSDs = 2.13-3.50). Fractions of emitted HCl p reaching to the alveolar region (= 85.8-88.8%) were much higher than that of the tracheobronchial region (= 6.53-8.80%) and head region (= 4.67-5.40%). It is concluded that more ill-health effects on the deep lung region can be expected than other regions as workers exposed to the contaminants emitted from TCS burning processes.
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