Acid Gas, Acid Aerosol and Chlorine Emissions from Trichlorosilane Burning Processes

Abstract

This study was set out to investigate the emission characteristics of HCl (in both particle (HCl p ) and gaseous (HCl g ) forms), and Cl 2 during the trichlorosilane (TCS) burning process under various relative humidity conditions (RH; range = 55%-90%) which might exist at its storage area. All experiments were conducted in a test chamber. We found that , emitted from the TCS burning process for the all selected RH conditions. The particle sizes of HCl p fell to the range of the accumulation mode (MMADs = 0.808-1.04 μm; GSDs = 2.13-3.50). Fractions of emitted HCl p reaching to the alveolar region (= 85.8-88.8%) were much higher than that of the tracheobronchial region (= 6.53-8.80%) and head region (= 4.67-5.40%). It is concluded that more ill-health effects on the deep lung region can be expected than other regions as workers exposed to the contaminants emitted from TCS burning processes.

Water-soluble Ions in PM2.5 on the Qianhu Campus of Nanchang University, Nanchang City: Indoor-Outdoor Distribution and Source Implications

“…Water-soluble ions are major components of atmospheric aerosols and can comprise up to 60-70% of particulate mass. Major inorganic water-soluble ions are associated with the degradation atmospheric visibility (Cheng et al, 2011), adverse human health effects (Karthikeyan et al, 2006) and acidity of precipitation (Kerminen et al, 2001;Soo et al, 2011). Inorganic ions can arise from both natural and anthropogenic sources such as oceans, dust storms, biomass combustion, construction, road traffic, industrial activities or even indoor activities and have been commonly used for the identification of PM sources (Hu et al, 2008;Khan et al, 2010;Deshmukh et al, 2011;Galindo et al, 2011;Zhang et al, 2011).…”

Chemical Composition, Characterization and Factors Affecting Household Dust (<20 µm) in Greater Cairo, Egypt

“…Adverse health and environmental effects of particulate are derived from their chemical components and properties [4] [5]. Inorganic water-soluble ions of dust are associated with the adverse human health effects [6], acidity of precipitation [7] [8], and soiling of the monuments [9]. They cause terrestrial and aquatic ecosystems damage [10].…”

Metal Corrosion of Al-Si-Cu Pattern Wafer Due to Chloride Ion Contaminants

“…), etching process (H 2 SO 4 , HNO 3 , HCl, HF, Cl 2 , HBr, F 2 , BCl 3 , etc.) and chemical vaporization process (Trichlorosilane) Soo et al, 2011). Acid gases of HF, HCl, HNO 2 , HNO 3 and SO x are known to create corrosion problems throughout the fab (Juozaitis et al, 2007;Lin et al, 2010).…”