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A slot waveguide structure is used in the part of arrayed waveguides in AWG instead of silicon waveguides. It is filled with high negative thermo-optic coefficient polymer in the narrow slot. The arrayed slot structure can remarkably reduce the center wavelength shift when the temperature changes. In this study, we use the polymer WIR30-490 and ZP49 to be filled in the slot. The thermo-optic coefficients of WIR30-490 and ZP49 are negative, and have the same order of magnitude with silicon. In our simulations, by adjusting several variables of the slot structure, such as the width of the slot between the pair of silicon wires, the width of the silicon waveguide, and the height of the silicon waveguide, we can get the athermal condition of AWG for each polymer. Even if there is an acceptable error on fabrication, temperaturedependent center wavelength shift of AWG can still be reduced down to 1 pm/°C. It makes the fabrication of athermal silicon AWG possible.

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