An electromagnetic scanning mirror with two DOF using a single permanent magnet is proposed. In the radial magnetic field, driving currents produce Lorentz forces about two axes of rotation. For an electromagnetic scanning mirror, it is very important to reduce the crosstalk in the current carrying lines. The scanning mirror uses compensation current routing to reduce the crosstalk and enable independent simultaneous control of each axis of rotation. Two independent current flows produce torque from the Lorentz force in the external magnetic field from a single permanent magnet under the mirror. The mirror is 3.5 mm × 3.5 mm and the movable frame 5.7 mm × 5.7 mm. The measured resonance frequency of the mirror is 2190 Hz and that of the movable frame is 920 Hz. In the resonance mode the angle of rotation of the mirror is ±1.51 • for an applied ac current of 20 mA rms and for the movable frame it is ±5.71 • for the same current. The system has a reduced disturbance sensitivity of 9.93 × 10 −6 , which is the ratio of angle of rotation of the movable frame due to the mirror. The scanning mirror can be applied to conventional imaging systems, scanning systems, etc.
SUMMARYA micro ion drag pump with planar electrodes on a glass substrate is fabricated and tested. The pump consisted of a 2-dimensional electrode pair array is driven by DC voltage using unipolar conduction. Ethyl alcohol is pumped in both directions, and the flow rate and the pressure are measured, in channels of depth 100 jim or 200 gin and width fixed at 3 mm. It is found that the pump could be fabricated easily and at lower cost than the micro ion drag pumps previously investigated.
A miniaturized fluorescence detection system for protein analysis is designed and fabricated. It consists of micro mirror for optical scanning, micro lens, collimating lens and micro prism to obtain efficient fluorescence detection. The optical components such as optical fiber bench, micro lens and micro prism are fabricated for the integration on silicon substrate. Final goal of the proposed detection system is to implement hand-held fluorescence detection system for bic-samples like protein chip.
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