Despite to promising material properties, only few applications of thin (up to 5 pm) piezoelectric PZT layers for actuation purpose of MEMS exist. To investigate actuation properties and application problems, this paper introduces the design, fabrication and characterization of 1D and 2D micro scanners actuated by a Sol-Gel deposited PZT layer of 1.5 pm thickness.For the manufactured samples, measurements are carried out. After determining the relative dielectric constant of the PZT layer to about 1000 and its piezoelectric constant djl to 20 ... 45 10-I2.C/N, scanning angles were measured. For the ID scanner, angles between 1 1 " and 35" could be determined, and for the 2D scanning structure 6.5" and 2.5" were observed for 10 Vpp maximum stimulation AC voltage.Deformation of the beams caused by technologically induced strain was found to change the behavior of the actuators. It can both, either decrease the device performance by increase of the mechanical compliance of the beam, or improve the performance by changing sinusoidal oscillation into a bucklingdetermined "snapping"
As techniques for locating the fault position of the power feeding line of the optical submarine cable, the electric time domain reflector, and the AC resistance measurement are discussed. Authors measured the fault position of the cable that was subject to fault using these two methods. The actual fault point was directly located by divers using AC magnetic field detection method. Comparison of both results confirmed the validity of the electrical fault localization method. The frequency dependency of the pulse propagation velocity in the armored cable was obtained based on the measurement result of the frequency response of the AC resistance measurement of the cable.
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