A carbon-nanotube (CNT) field emitter with side-gate electrodes, which are placed in-plane with the CNT emitters, is one of the most promising structures to realize a large-area X-ray charge neutralizer with a cost-effective and easy process. An X-ray source using the screen-printed CNT field emitter with side-gate electrodes is developed. The field-emission and X-ray properties are evaluated with anode voltages of 5 and 10 kV. It is shown that the emission current can be controlled by the side-gate voltage even with such high anode voltages as 5 and 10 kV. It is reported that the highest anode current is approximately 1 µA, which is high enough for an X-ray charge neutralizer. The X-ray radiation is successfully controlled by the pulsed side-gate voltage with subsecond length.

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An X-ray charge neutralizer using a screen-printed carbon-nanotube field emitter is demonstrated to show the possibility of a large-area flat-panel charge neutralizer, although the device dimensions in the present work are not very large. The X-ray yields and spectra are characterized to estimate the ion generation rate as one of the figures of merit of neutralizers. Charge neutralization characteristics are measured and show good performance.