A micro-heater is used inside silicon micro-gyroscope to keep the working temperature of gyroscope constant so as to minimize the effect of environment temperature on performances of gyroscope. The structure of gyroscope package is first given. With a heater inside, the characteristics of gyroscope, such as frequency, coupled vibrations, temperature distribution and thermal equilibrium time, are predicted with the aid of ANSYS, a finite element tool. Finally, surfaces of the package are optimized with anti-radiation shields covering. As a result, when gyroscope is subjected to an ambient temperature of 20°C, the temperature of itself could reach the equilibrium state of about 84°C within 2 minutes with a temperature difference of about 2°C between the anchor and the proof mass. Besides, if ambient temperature increases from -40°C to 80°C, heating power consumption is degraded from 1.27625W to 0.09712W. However, this design needs further improvement to decrease its heating power consumption and equilibrium time.
A CMOS integrated interface circuit for micro-machined gyroscope containing a novel front-end and 6th-order Sigma-delta modulator is presented in this paper. To reduce the noise coming from the sensor and circuit, the front-end is accomplished by a switched-capacitor architecture, which constructed by a high-gain fully-differential amplifier and improved by chopper-stabilization technique, and work under a designed charging and sampling logic scheme. A cascade 6th-order Sigma-Delta modulator is designed to get high resolution, reduce quantized error and suppress the instability brought by high-order modulator. With the cascade structure and 16-bit resolution 32 OSR, the modulator outputs 3-bits digital stream. The whole circuit is designed with AMS technique and 3.3V power consumption. The simulation result presents that the interface circuit performs a appointed under a low-noise design specification in signal band, and the SNR of the circuit achieves remarkable value of 106dB.
This paper presents a new microelectromechanical hybrid gyroscope (MHG) with three equilibrium rings. This structure can eliminate the error caused by the double rotation frequency of the driving shaft successfully. The MHG kinematic equations with three equilibrium rings are derived in this paper. Meanwhile, a new digital design and simulation of the MHG closed-loop detection circuit are proposed based on FPGA. The noise interference is weakened by using differential mode signal detection and the resources of FPGA are decreased by the loop diode demodulation in this paper. The cross axis coupling of the decoupled system is about 2.4%. The phase margin is 70deg and the magnitude margin is 22db after correction. The transcient response simulation is tested when the inputs are sinusoidal functions. The bandwidth and scale factors of x-axis and y-axis closed loops are analyzed in the paper. The bandwidth can reach about 70Hz and the scale factors of x-axis and y-axis closed loops are 0.1467V/o/s and -0.1467V/o/s respectively.
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