The mainstream of resolution enhancement techniques (RET) to critical layers is model-based optical-proximity-effect-correction (OPC) at the 90-nm node and below. For model-based OPC, the simulation model is calibrated using a test pattern transferred onto the wafer on a best dose and best focus condition, so process variations (i.e. focus, exposure dose, etc) cause pinching or bridging (open or short error), otherwise called a hotspot. The technique of reducing hotspots by sub-resolution assist features (SRAFs) and litho-friendly layout [1] are already proposed. However, these methods sometimes cannot improve hotspots by design layouts or the post-OPC shapes. We have developed the technique which improves hotspots by additional modification to the post-OPC patterns of hotspots.
This paper presents a result of walking experiment of a novel 6-axis force sensor with simultaneous plantar deformation measurement by high-speed cameras under the sensor is presented. The sensor is based on two custom beams and some strain gages in order not to be limited a view of the high-speed cameras. In walking analysis research field, the 6-axis force and plantar skin deformation are very important factors to identify the risk of fall and to reduce risk of fallrelated injuries in elderly populations. However, there were no sensor can measure 6-axis force and plantar skin deformation simultaneously. In this paper, the result of assessment experiment of the sensor is described.
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