Microfocusing of 100 keV x ray with a sputtered-sliced Fresnel zone plate (ss-FZP) has been performed at the 250-m-long beamline (20XU) of SPring-8. The ss-FZP with an outermost zone width 0.16 μm which is composed of 70 layers of alternating Cu and Al layers and having thickness ∼180 μm was fabricated and characterized. The minimum focal spot size attained for the first order focal beam was 0.5 μm with a focal distance 900 mm at a photon energy 100 keV. The total flux of the microprobe was ∼2×106 photons s−1 μm−2.
Hard X-ray microbeam experiments with sputtered-sliced Fresnel zone plates have been performed. Zone plates with an outermost zone width of 0.25 microm (#FZP1) and 0.1 microm (#FZP2) were fabricated and evaluated. In a scanning X-ray microscopy experiment, a line-and-space pattern with structure as fine as 0.1 microm was resolved using #FZP2 at an X-ray wavelength of 1 A. As an application of the microbeam technique, a two-dimensional distribution of constituent elements in forensic samples has been obtained (e.g. section view of human and elephant hairs) using fluorescent scanning microscopy.
A Fresnel phase zone plate for hard x ray was fabricated by physical vapor deposition alternating transparent and opaque layers onto a fine gold wire core 47 μm in diameter. The zone plate, which is comprised of 25 pairs of alternating Ag and C layers, is designed to operate with a focal length of 124 mm for a parallel beam at 8.1 keV. The thickness of the zone plate is less than 10 μm and is capable of operating as a phase zone plate. Using the brilliant monochromatized x-ray beam from the TRISTAN Main Ring, with an undulator, the minimum focal spot size attained for the first order focal beam was 0.5 μmφ. The light collecting efficiency was determined to be near 11%.
A Zernike-type imaging microscope using a sputtered-sliced Fresnel zone plate (SS-FZP) has been developed and tested at an X-ray energy of 25 keV. The SS-FZP was used as an objective. A copper (Cu) phase plate was placed at the back focal plane of the SS-FZP in order to produce phase contrast. The performance of the Zerniketype imaging microscope was tested with a gold (Au) mesh and a resolution test pattern at undulator beamline 47 of SPring-8. The Au mesh and the resolution test pattern could be imaged in transmission with a magni®cation of Â10.2. Owing to the Cu phase plate, different image contrast was observed compared with the bright-®eld image contrast. Tantalum microstructures down to 0.5 mm line-and-space have been observed on spatial resolution test patterns.
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