Basis on the analysis of the plate flatness detection, some problems of the traditional flatness measuring method is pointed out and the 3D reconstruction method of flatness is proposed. The digital flatness measuring instrument is designed, and the measured plane information is entered into the computer, then the data processing is completed by software, which solves the problem of amounts of data, complicated calculation and low accuracy of traditional measurement method. The 3D reconstruction of surface morphology is completed by OpenGL and BCB, to make the information of flatness more sufficient and intuitive. To verify the validity of the measurement, use the flatness function module of dual-frequency laser interferometer to evaluate the instrument accuracy, the results show that it reaches the expected precision index.
This paper presents a novel precision three-dimensional platform based on vertical scanning that has practical application in surface topography measurement. The three-dimensional precision platform is composed of a two-dimensional platform with metrology system and a vertical scanning platform. When the work piece is measured, the closed loop control system controls the two-dimensional platform. Meanwhile, the Z direction servo motor and the piezoelectric actuator drive the vertical scanning platform to move vertically to realize the fine displacement. The diffraction grating displacement sensor detects the vertical relative displacement of the vertical scanning platform.
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