This paper reviews recent developments of micro ultrasonic rotary motors using piezoelectric resonant vibrations. Following the historical background, four ultrasonic motors recently developed at Penn State University are introduced; windmill, PZT tube, metal tube, and shear-type motors. Driving principles and motor characteristics are described in comparison with the conventional ultrasonic motors. Motors with 1.5 mm in diameter and 0.8 mN·m in torque have been actually developed.
The smallest discrete piezoelectric ultrasonic motor using bulk ceramics was developed. We are proposing basically a two-part motor: stator and rotor. The stator of the present motor consists of a hollow metal brass tube with outer diameter of 1.6 mm, inner diameter of 0.8 mm and length of only 4 mm with 2 PZT plates bonded onto it. Owing to the asymmetrical stator surface, two degenerated orthogonal bending modes were slightly split, resulting in a wobbling motion. Thus, the motor can be driven by a single driving source. The rotor is a spring, which is basically different from previous designs, pressed at both ends to the stator by a pair of ferrules. Consequently, the length of the whole motor assembly was reduced significantly; a final motor length of only 5 mm was obtained. The working frequency under zero load was approximately 227–233 kHz. Although the size is small, relatively high power was obtained under an optimized load condition: torque of 0.06 mNm, maximum power of 3.2 mW with a speed of 118 rad/s, and maximum efficiency of 11% under 48 Vrms at 221 kHz.
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