We describe a transfer standard for low absolute and gauge pressure in the range 1 Pa to 10 kPa. This transfer standard is composed of three differential capacitance diaphragm gauges (CDGs) of full-scale 130 Pa, 1.3 kPa and 13 kPa respectively and one absolute 130 kPa resonant silicon gauge (RSG). The objective for the relative uncertainty contribution (<em>k</em>=1) of this standard during a comparison is a few tens of ppm at 10 kPa to a few hundred ppm at 1 Pa. It relies on a good long-term stability of the calibration slope of the RSG used, between 5 kPa and 10 kPa, disseminated to CDGs in absolute mode and subsequently in gauge mode. The methods to assess such uncertainty and the preliminary characterisation of the transfer standard are presented.
Abstract. We describe a calibration device for absolute pressure ranging from 5 kPa to 130 kPa whose relative uncertainty contribution (k = 1), including stability, repeatability and linearity is better than 1 Pa. The device is composed of a capacitance diaphragm gauge (CDG) and a resonant silicon gauge (RSG). The good long-term stability of the calibration slope of the RSG disseminated to the CDG which in turn allows one to master the offset of the RSG, is the reason for such a low uncertainty contribution. The metrological characterisation of this working standard is presented.
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.