Development and characterisation of a low pressure transfer standard in the range 1 Pa to 10 kPa

Abstract

We describe a transfer standard for low absolute and gauge pressure in the range 1 Pa to 10 kPa. This transfer standard is composed of three differential capacitance diaphragm gauges (CDGs) of full-scale 130 Pa, 1.3 kPa and 13 kPa respectively and one absolute 130 kPa resonant silicon gauge (RSG). The objective for the relative uncertainty contribution (<em>k</em>=1) of this standard during a comparison is a few tens of ppm at 10 kPa to a few hundred ppm at 1 Pa. It relies on a good long-term stability of the calibration slope of the RSG used, between 5 kPa and 10 kPa, disseminated to CDGs in absolute mode and subsequently in gauge mode. The methods to assess such uncertainty and the preliminary characterisation of the transfer standard are presented.

A high-accuracy working standard for absolute pressure from 5 kPa to 130 kPa

“…The characterisation of the working standard took place during the study of a low pressure transfer standard [1], as well as in the framework of the EMPIR project 14IND06 [8]. The CDG10k used was a differential one; however, its behaviour is analogous to that of an absolute CDG and so has similar performances.…”

“…In previous work [1], we presented a resonant silicon gauge (RSG), full scale 130 kPa that exhibits a good longterm stability in its calibration slope and which was used to rescale a capacitance diaphragm gauge (CDG) of full scale 13 kPa, and stepwise two other CDGs of full scale 1 kPa and 100 Pa full scale respectively. In the present study, we focus on the RSG and the CDG 10 kPa.…”