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We report on the interesting properties of a novel single precursor, Cd(tta)2 x tmeda (Htta = 2-thenoyl-trifluoroacetone, tmeda = N,N,N',N'-tetramethylethylenediamine), ideally suited for the selective and reproducible fabrication of pure quality films of CdS or CdO through a simple solution process.

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Metal-organic (MO)CVD processes using three different precursors (Bi(tmhd) 3 , 3 , and Bi(o-tol) 3 ) have been investigated. Combined, thermal, and mass spectroscopic investigations have provided information on their thermal robustness during sublimation processes. In-situ Fourier-transform infrared (FTIR) measurements have allowed the monitoring of masstransported precursors during MOCVD experiments. Temperature windows of 190±277 C, 170±270 C, and 150±220 C have proved suitable for the efficient vaporization of Bi(tmhd) 3 , Bi(p-tol) 3 , and Bi(o-tol) 3 , respectively, even though aryl precursors have proved to be more stable than b-diketonate during the sublimation and transport processes.Above 350 C, decomposition during the MOCVD processes has been observed for all the precursors. In the case of Bi(tmhd) 3 and Bi(o-tol) 3 it involves the ligand fragmentation, while for Bi(p-tol) 3 , dissociation of the intact aryl ring seems to occur.

Metal-organic (MO)CVD processes using two different precursors, (La(tmhd) 3 and La(tmod) 3 ), have been investigated. Insitu Fourier transform infrared (FTIR) spectroscopy investigations and thermal analysis have provided information on their thermal robustness during the sublimation processes and mass-transport properties during MOCVD experiments. Both precursors can be efficiently vaporized in the temperature range 160-230°C even though La(tmod) 3 exhibits higher volatility. Lanthanum oxides have been efficiently deposited using a direct liquid injection (DLI) equipped MOCVD reactor in the temperature range 350-500°C for both precursors. The effect of the addition of tetraglyme to the precursor solution has been evaluated. Films mainly consist of different phases of La 2 O 3 and LaO(OH), while the carbon-containing La 2 O 2 CO 3 phase was observed only on the surface, with no relevant carbon contamination being present in the bulk of the film.